Capacity, m³/hup to 100,000
Nitrogen purity,%up to 99.9999
Oxygen purity, %up to 99.95
Argon purity, %up to 99.9999
Pressure, MPaup to 20
Dew point temperature, °C−60 to −70
Operating temperature, °C−45 to +40
Unit operating life, thousands hours150 to 250